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Title | Communication—Electrodeposition of Nano-Twinned Cu in Void-Free Filling for Blind Microvia of High Density Interconnect | ||
Authors | Zhu Q S, Zhang X, Li S J,Liu C Z,Li C F | ||
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Title of Journal | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | ||
Year | 2019 | ||
Volume | 166 | ||
Number | 1 | ||
Page | D3097 -D3099 | ||
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