Details of the Publication | |||
Paper Code | 0257-8972 | ||
Title | Growth of large-scale heteroepitaxial 3C-SiC films and nanosheets on silicon substrates by microwave plasma enhanced CVD at higher powers | ||
Authors | Wang C, Huang N, Zhuang H, Zhai Z F,Yang B, Liu L S, Jiang X | ||
Corresponding Author | Jiang X | ||
Title of Journal | Surface & Coatings Technology | ||
Year | 2016 | ||
Volume | 299 | ||
Number | |||
Page | 96-103 | ||
Abstract | |||
Full Text | |||
Full Text Link | |||
Others: | |||
Classification: | SCI | ||
Source: | |||
close |